Illumination system with raster elements of different sizes

Details Illumination system with raster elements of different sizes Illumination system with raster elements of different sizes

2008-07-15

2008-07-15

Ho, Allen C. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Lithography

C378S084000, C378S085000, C250S492200, C355S053000, C355S067000, C355S070000, C355S071000, C359S621000, C359S622000, C359S627000

Reexamination Certificate

active

10040717

ABSTRACT:
There is provided an illumination system for lithography with wavelengths of ≦193 mn. The system comprises a first optical element, which is divided into first raster elements and lies in a first plane. The first plane defines an x-direction and a y-direction, the first raster elements each have an x-direction and a y-direction with an aspect ratio, and at least two of the first raster elements have aspect ratios of different magnitude.

REFERENCES:
patent: 4682885 (1987-07-01), Torigoe
patent: 5098184 (1992-03-01), Van den Brandt et al.
patent: 5251067 (1993-10-01), Kamon
patent: 5315629 (1994-05-01), Jewell et al.
patent: 5339346 (1994-08-01), White
patent: 5361292 (1994-11-01), Sweatt
patent: 5439781 (1995-08-01), MacDowell et al.
patent: 5512759 (1996-04-01), Sweatt
patent: 5581605 (1996-12-01), Murakami et al.
patent: 5594526 (1997-01-01), Mori et al.
patent: 5636003 (1997-06-01), Tanitsu et al.
patent: 5662401 (1997-09-01), Shimizu et al.
patent: 5669708 (1997-09-01), Mashima et al.
patent: 5677939 (1997-10-01), Oshino
patent: 5719709 (1998-02-01), Kodaka
patent: 5737137 (1998-04-01), Cohen et al.
patent: 5754278 (1998-05-01), Kurtz
patent: 5805365 (1998-09-01), Sweatt
patent: 5896438 (1999-04-01), Miyake et al.
patent: 5912725 (1999-06-01), Tanitsu
patent: 5963305 (1999-10-01), Mizouchi
patent: 6002467 (1999-12-01), Nishi et al.
patent: 6057899 (2000-05-01), Tanaka et al.
patent: 6181482 (2001-01-01), Grafton
patent: 6195201 (2001-02-01), Koch et al.
patent: 6198793 (2001-03-01), Schultz et al.
patent: 6219111 (2001-04-01), Fukuda et al.
patent: 6260972 (2001-07-01), Robinson et al.
patent: 6337759 (2002-01-01), Yamamoto
patent: 6400794 (2002-06-01), Schultz et al.
patent: 6402325 (2002-06-01), Yamamoto
patent: 6438199 (2002-08-01), Schultz et al.
patent: 6504896 (2003-01-01), Miyake et al.
patent: 6507440 (2003-01-01), Schultz
patent: 6594334 (2003-07-01), Ota
patent: 6637892 (2003-10-01), Okuyama et al.
patent: 6704095 (2004-03-01), Schultz
patent: 6741394 (2004-05-01), Tanitsu et al.
patent: 6833904 (2004-12-01), Komatsuda
patent: 19903807 (1999-11-01), None
patent: WO9949505 (1999-09-01), None
Eugene Hecht and Alfred Zajac. Optics (Reading, MA: Addison-Wesley, 1979), p. 144-145.
European Search Report dated Feb. 16, 2006 in connection with corresponding European Patent Application No. 01127095.6-2222.

Affiliated with

Also associated with

Rating

Illumination system with raster elements of different sizes does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination system with raster elements of different sizes, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination system with raster elements of different sizes will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3957566