Illumination system with a grating element

Details Illumination system with a grating element Illumination system with a grating element

2007-07-24

2007-07-24

Ho, Allen C. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Lithography

C378S084000, C250S492200, C355S067000, C355S071000, C359S566000, C359S569000

Reexamination Certificate

active

09961819

ABSTRACT:
An illumination system, particularly for wavelengths ≦100 nm, with an object plane and a field plane, comprises a grating element and a physical diaphragm in a diaphragm plane, which is arranged downstream to the grating element in the beam path from the object plane to the field plane.

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