IGBT with reduced forward voltage drop and reduced switching los

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Gettering of semiconductor substrate

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438234, 438473, 438310, 438543, 257558, 257616, 257617, H01L 218232

Patent

active

060431121

ABSTRACT:
The boundary between the P type silicon base and N.sup.+ buffer layer of an IGBT is intentionally damaged, as by a germanium implant, to create well defined and located damage sites for reducing lifetime in the silicon.

REFERENCES:
patent: 5250445 (1993-10-01), Bean et al.
patent: 5766966 (1998-06-01), Ng
Z. Radzimski et al., Minority-Carrier Lifetime Analysis of Silicon Epitaxy and Bulk Crystals with Nonuniformly Distributed Defects, IEEE Trans. Electronic, Div. ED-35, 80 (Jan. 1988) pp. 80-84.
S. Wolf et al., Silicon Processing, vol. 1, (1986), Lattice Press, pp. 295-303.

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