IC Tester using an electron beam capable of easily setting a pro

Details IC Tester using an electron beam capable of easily setting a pro IC Tester using an electron beam capable of easily setting a pro

1983-05-17

1985-07-30

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

324158F, G01R 3102, G01R 3126, G01N 2300

Patent

active

045324239

ABSTRACT:
An IC tester including a specimen chamber and an electron optical column for radiating an electron beam to a specimen placed in the specimen chamber, wherein a fixed table is attached to a Z table in the specimen chamber and includes downwardly protruding spring contact pins which are connected to lead wires led outside of the specimen chamber. A probe card unit for testing an IC wafer is provided on the upper surface of the fixed table and includes electric terminals having the same positional relation as that of the spring contact pins. A probe card unit fixing mechanism is attached to the undersurface of the fixed table and is so arranged that the probe card unit can be slid laterally along the undersurface of the fixed table and then upward to press the probe card unit against the undersurface of the fixed table and to bring the spring contact pins into electrical contact with their corresponding probe card terminals.

REFERENCES:
patent: 4038599 (1977-07-01), Bove et al.
patent: 4183609 (1980-01-01), Luna
P. Fazekas, H. Lindner, R. Lindner, J. Otto and E. Wolfgang, "On-Wafer Defect Classification of LSI-Circuits Using a Modified SEM", Scanning Electron Microscopy, vol. I, SEM Inc., AMF O'Hare, IL 60666.
Electronics International, vol. 54, No. 14, Jul. 1981, pp. 105-112, New York, U.S.A.
Siemens Forschungs-und Entwicklungsberichte, vol. 6, No. 1, 1977, pp. 39-46.
IBM Technical Disclosure Bulletin, vol. 23, No. 7A, Dec. 1980, pp. 2803-2804, New York, U.S.A.

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