4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. Utilizing a spectrometer

Toru Tojo

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Alignment apparatus for substrates

Data processing: generic control systems or specific application – Specific application – apparatus or process – Robot control
Reexamination Certificate

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Alignment method

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Apparatus for emitting a beam to a sample used for...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Apparatus for inspecting slight defects on a photomask pattern

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Automatic focusing apparatus

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Profile ID: LFUS-PAI-P-121758

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