Hybrid method for depositing semi-conductive materials

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

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Details

148 33, 136265, 20419215, 20429826, C23C 1434

Patent

active

054395755

ABSTRACT:
The invention provides a method and apparatus for depositing alloy films useful in manufacturing photovoltaic solar cells. In the preferred embodiment an alloy comprising copper, indium, and selenium is deposited on a substrate. Sputtering is utilized to provide the copper and indium, with the selenium being provided by evaporization. Other alloys may also be formed using the disclosed apparatus and techniques.

REFERENCES:
patent: 4465575 (1984-08-01), Love et al.
patent: 4596645 (1986-06-01), Stirn

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