4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Timothy Lommasson

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Hybrid method for depositing semi-conductive materials

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Micro-electromechanical devices

Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1137911

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