Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1996-08-12
1998-03-24
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
G21K 508
Patent
active
057315876
ABSTRACT:
A hot stage for a scanning probe microscope includes a substrate having a dielectric window region which is stress compensated to be held in mild tension at elevated temperatures. A heating element is supplied to heat a specimen deposited on the dielectric widow region and the scanning probe microscope is used to observe specimen characteristics at the elevated temperatures. The dielectric window region is configured to be thermally isolated from the rest of the hot stage allowing only a minimum amount of heat to be dissipated into the scanning probe microscope. Temperature sensing resistors are included for monitoring the temperature in the dielectric window region. Conductivity cell electrodes can also be included for sensing the conductivity and capacitance of the specimen. Furthermore, additional control and measurement hardware, such as a temperature sensor circuit, evaluation station, the ramp generator circuit, etc. can be included to provide additional system features.
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DiBattista Michael
Gland John L.
Patel Sanjay V.
Schwank Johannes W.
Nguyen Kiet T.
The Regents of the University of Michigan
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