Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1997-11-06
2000-02-15
Niebling, John F.
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438404, 438412, H01L 21336, H01L 2176
Patent
active
060252308
ABSTRACT:
This invention discloses a MOSFET power device supported on a substrate. The MOSFET power device includes a plurality polysilicon-with-oxide-cap segments disposed over a gate oxide layer including two outermost segments and a plurality of inner segments include a plurality of gate oxide-plug openings. Each of the inner segments functions as agate and the two outer most segments function as a field plate and an equal potential ring separated by a termination oxide-plug gap and the gate oxide-plug openings and the termination oxide-plug gap having an aspect ratio greater or equal to 0.5. The MOSFET power device further includes a plurality of MOSFET transistor cells for each of the gates, wherein each transistor cells further includes a source region, a body region, the transistor cells further having a common drain disposed at a bottom surface of the substrate. Each of the inner segments functions as a gate having a side wall spacer surrounding edges of the inner segments, and the gate oxide-plug openings and the termination oxide-plug gap being filled with an oxide plug. The MOSFET transistor cells are covered by an overlying insulation layer having a plurality of contact openings defined therein. The MOSFET power device further includes a plurality of metal segments covering the overlying insulation layer and being in electric contact with the DMOS device through the contact opening. The MOSFET power device further includes a plurality of deep-and-narrow gaps between the metal segments wherein each gap having an aspect ratio equal to or greater than 0.5.
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Hshieh Fwu-Iuan
So Koon Chong
Lebentritt Michael S.
Lin Bo-In
Mageposer Semiconductor Corporation
Niebling John F.
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