Data processing: measuring – calibrating – or testing – Testing system – Signal generation or waveform shaping
Patent
1996-06-18
1999-06-01
Wachsman, Hal Dodge
Data processing: measuring, calibrating, or testing
Testing system
Signal generation or waveform shaping
702 40, 36446827, 36446828, 364490, 2504922, G06F 1900
Patent
active
059096586
ABSTRACT:
A pattern data processor system is disclosed that comprises a pattern storage device for storing pattern data, a Redundant Array of Independent Disks (RAID) pattern memory buffer for receiving and temporarily holding the pattern data from the pattern storage device, a shape processor for processing and decoding the pattern data, a shape divider, and a shape generator for generating a shape from the decoded pattern data. The shape processor comprises a programmable gate array device (FPGA) that dynamically decodes different pattern data formats with different decoding schemes, allowing for high speed processing. A Previous Output Shape (POS) Register is also disclosed, which uses information from previous shapes to decompress new shapes, thus allowing for variable length macro and pattern data, and conserving disk space.
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Rockrohr et al., Performance of IBM's EL-4 e-beam lithography system, Reprinted from Electron-Beam,X-ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V, Feb. 20-21, 1995, vol. 2437, pp. 160-167.
Clarke Eileen Veronica
Kay John William
Kostek Christine Ann
Lieberman Jon Erik
Pierce Daniel Lee
Cutter Lawrence D.
International Business Machines - Corporation
Soucar Steven J.
Wachsman Hal Dodge
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