Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1990-07-30
1992-02-11
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250287, 250307, H01J 3708
Patent
active
050878158
ABSTRACT:
Disclosed is a method and apparatus for the measuring of isotopic ratio determination of elements on metallic, semi-conducting or insulating surface. The method involves pulsing an ion beam of at least about 2 KeV at a grazing incidence to impinge upon the surface of the sample. The ions which are recoiled off the surface of the sample are detected with a high resolution time-of-flight mass spectrometer which is comprised of at least one linear field free drift tube and at least one toroidal or spherical energy filter with a +/-V polarization to detect positive or negative ions. The method is applicable to a wide variety of elements from the periodic table and the ion source can be selected from a wide variety of ions which can be bombarding onto a sample. There are further methods for measuring of the ions under high pressure mass spectrometry, at pressures as high as 1 Torr. The apparatus can be adapted for the quantitation measurement of the elements on the surface under the high pressure conditions. Also disclosed is an apparatus for measuring ions. This apparatus can contain anywhere from 1 to 5 mass analyzers including measurements for recoiled and direct recoiled ions, for ion scattering spectroscopy, for secondary ion spectroscopy and for detecting backscattered ions. Mass analyzers are positioned at appropriate angles to detect the ions released from the bombardment of the sample. When measuring the backscattering ions, the apparatus is set up for two separate sources.
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Schmidt Howard K.
Schultz J. Albert
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