High resolution atom probe

Details High resolution atom probe High resolution atom probe

2007-01-02

2007-01-02

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S440110, C250S306000, C250S307000, C250S309000, C250S311000, C324S451000

Reexamination Certificate

active

10559733

ABSTRACT:
A three dimensional atom probe comprising a sharp specimen (10) coupled to a mounting means (12) where emission of charged particles is caused by application of a potential to the specimen tip (10) such that charged particles are influenced by filtering electrodes (206, 204) before impingement on a detection screen (202).

REFERENCES:
patent: 5440124 (1995-08-01), Kelly et al.

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