Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1988-04-15
1990-01-23
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
313542, H01J 4300
Patent
active
048960357
ABSTRACT:
An improved ion detection system and method for detection of low or high mass ions. A target having a low work function, photoemissive surface layer is employed to fragment the incident ions and produce secondary negative ions and electrons. The target surface preferably is formed of a thin layer of an alkali antimonide compound, bialkali antimonide compound, multi-alkali antimonide compound, cesiated III - V semiconductor compound, or other photoemissive material having a relatively low band gap energy and electron affinity. Additionally, the photoemissive material should have a low thermionic emission level at room temperature to reduce noise levels in the detector. The secondary ions and electrons may be detected by a conventional electron multiplier detector. The potential difference between the target surface and electron multiplier detector is chosen to accelerate the secondary ions and electrons to the electron multiplier detector with an energy corresponding to high detection efficiency.
REFERENCES:
patent: 3478213 (1969-11-01), Simon et al.
patent: 3914136 (1975-10-01), Kressel
patent: 3960620 (1976-06-01), Ettenberg
patent: 4019082 (1977-04-01), Olsen et al.
Mahoney John F.
Perel Julius
Anderson Bruce C.
Phrasor Scientific, Inc.
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