Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2011-07-19
2011-07-19
Landau, Matthew C (Department: 2813)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S393000, C257S310000, C257SE21008
Reexamination Certificate
active
07981741
ABSTRACT:
Deposited thin-film dielectrics having columnar grains and high dielectric constants are formed on heat treated and polished metal foil. The sputtered dielectrics are annealed at low oxygen partial pressures.
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Bao Lijie
Li Zhigang Rick
Palanduz Cengiz A.
Reardon Damien
Ryley James F.
E. I. Du Pont de Nemours and Company
Landau Matthew C
Luke Daniel
LandOfFree
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