Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1986-09-02
1988-10-11
Evans, F. L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356308, 356334, 356382, G01B 1106, G01J 342
Patent
active
047766956
ABSTRACT:
A system for ascertaining the thickness of thin films, especially on semiconductor substrates, comprising a light source, a randomized bifurcated fiber optic bundle, a pentamirror, a rapid scanning monochromator with a rotating grating, a photodetector, and A/D converter, an interface and a data reduction computer. The randomized bifurcated fiber optic bundle via the pentamirror directs light to and receives reflected light from a surface of the thin film, the reflected light passes through the bifurcated bundle to the monochromator and to the photodetector whose output is read by the A/D converter. A timing control circuit is provided which has an input from an encoder coupled to the motor rotating the grating and clock and trigger outputs coupled to the A/D converter so that the A/D converter consistently samples the analog signal representative of the same portions of the reflected visible spectra returned from the thin film under test.
REFERENCES:
patent: 3637310 (1972-01-01), Naono
patent: 3751643 (1973-08-01), Dill et al.
patent: 4093991 (1978-06-01), Christie, Jr. et al.
patent: 4165180 (1979-08-01), Failes
patent: 4645349 (1987-02-01), Tabata
Borglum Wayne K.
Mallory Chester
van Pham Hung
Evans F. L.
Prometrix Corporation
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