Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2007-09-11
2007-09-11
Robinson, Daniel (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C118S724000
Reexamination Certificate
active
11132539
ABSTRACT:
An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.
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Cardema Rudy Santo Tomas
Choy Shuen Chun
Koren Zion
O'Carroll Conor Patrick
Strod Arieh A.
Dority & Manning P.A.
Mattson Technology Inc.
Robinson Daniel
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