4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Rudy Santo Tomas Cardema

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Heating configuration for use in thermal processing chambers

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Heating configuration for use in thermal processing chambers

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Method and system for rotating a semiconductor wafer in...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Windows used in thermal processing chambers

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2618647

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