4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Shuen Chun Choy

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Heating configuration for use in thermal processing chambers

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Heating configuration for use in thermal processing chambers

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Heating device for heating semiconductor wafers in thermal...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2734073

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