Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2006-12-05
2006-12-05
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
Shape or surface configuration
C356S628000, C356S237500, C356S625000, C702S027000, C702S028000, C702S155000, C438S016000
Reexamination Certificate
active
07145664
ABSTRACT:
A method for modeling samples includes the use of control points to define lines profiles and other geometric shapes. Each control point used within a model influences a shape within the model. Typically, the control points are used in a connect-the-dots fashion where a set of dots defines the outline or profile of a shape. The layers within the sample are typically modeled independently of the shape defined using the control points. The overall result is to minimize the number of parameters used to model shapes while maintaining the accuracy of the resulting scatterometry models.
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Cao Xuelong
Chu Hanyou
Opsal Jon
Wen Youxian
Pham Hoa Q.
Stallman & Pollock LLP
Therma-Wave, Inc.
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