Gettering members, methods of forming the same, and methods...

Details Gettering members, methods of forming the same, and methods... Gettering members, methods of forming the same, and methods...

2011-04-26

2011-04-26

Duda, Kathleen (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Processing feature prior to imaging

C430S313000

Reexamination Certificate

active

07932019

ABSTRACT:
Provided herein are gettering members that include a monitor substrate and a conditioning layer thereon. Also provided herein are methods of forming gettering layers and methods of performing immersion lithography processes using the same.

REFERENCES:
patent: 7595142 (2009-09-01), Endo et al.
patent: 7776506 (2010-08-01), Wang et al.
patent: 2006/0033898 (2006-02-01), Cadee et al.
patent: 2006/0275706 (2006-12-01), Corliss et al.
patent: 2006/0275709 (2006-12-01), Van Buel
patent: 2008/0129970 (2008-06-01), Furukawa et al.
patent: 2005252247 (2005-09-01), None
patent: 1020050120412 (2005-12-01), None
patent: 10-2007-0109005 (2007-11-01), None
patent: WO 2006/080250 (2006-08-01), None
patent: WO 2006/115268 (2006-11-01), None
Korean Intellectual Property Office, Notice of Decision to Grant Patent, KR 10-2007-0058563, issued Nov. 14, 2008.

Affiliated with

Also associated with

Rating

Gettering members, methods of forming the same, and methods... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gettering members, methods of forming the same, and methods..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gettering members, methods of forming the same, and methods... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2687915