Gate length control for semiconductor chip design

Details Gate length control for semiconductor chip design Gate length control for semiconductor chip design

2005-09-06

2005-09-06

Thompson, Craig A. (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S705000

Reexamination Certificate

active

06939758

ABSTRACT:
A semiconductor device includes first and second polysilicon areas on a chip. The first polysilicon area corresponds to circuit elements of the semiconductor device. At least some of the first polysilicon corresponds to polysilicon gates. At least some of the second polysilicon area comprises contacts of the semiconductor device. Metal covers the polysilicon contacts.

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