4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Nobuo Matsuki

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Apparatus and method for forming low dielectric constant film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Apparatus and method for forming low dielectric constant film

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus for forming thin film on semiconductor substrate...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Device isolation technology on semiconductor substrate

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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Gas-shield electron-beam gun for thin-film curing application

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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