Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate
2011-06-14
2011-06-14
Lorengo, Jerry (Department: 1731)
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
C427S579000, C427S115000, C427S255393, C427S255394
Reexamination Certificate
active
07959987
ABSTRACT:
A method and apparatus for depositing a material layer to treat and condition a substrate, such as a fuel cell part, is described. The method includes depositing a hydrophilic material layer on a portion of the surface of the substrate in a process chamber from a mixture of precursors of the hydrophilic material layer. In addition, the method includes reducing a fluid contact angle of the substrate surface. The hydrophilic material layer comprises a wet etch rate of less than about 0.03 Å/min in the presence of about 10 ppm of hydrofluoric acid in water. The material layer can be used to condition various parts of a fuel cell useful in applications to generate electricity.
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Bachrach Robert
Blonigan Wendell T.
White John M.
Won Tae Kyung
Applied Materials Inc.
Lorengo Jerry
Patterson & Sheridan L.L.P.
Wood Jared
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