Front plate for an ion source

Details Front plate for an ion source Front plate for an ion source

2007-04-26

2010-02-02

Nguyen, Kiet T (Department: 2881)

Radiant energy

Ion generation

Field ionization type

Reexamination Certificate

active

07655924

ABSTRACT:
The present invention relates to a front plate for an ion source that is suitable for an ion implanter. The front plate according to the invention comprises obverse and reverse sides, an exit aperture for allowing egress of ions from the ion source that extends substantially straight through the front plate between the obverse and reverse sides, and a slot penetrating through the front plate from obverse side to reverse side at a slant for at least part of its depth, the slot extending from a side of the front plate to join the exit aperture. The slot is slanted to occlude line of sight into the ion source when viewed from in front, yet provides an expansion gap.

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patent: 5420415 (1995-05-01), Trueira
patent: 2004/0212288 (2004-10-01), Kanarov et al.
patent: 2005/0016838 (2005-01-01), Murata et al.
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International Search Report and Written Opinion of the International Search Authority mailed Aug. 20, 2007 (PCT/GB2007/001541).
Patents Act 1977: search Report under Section 17(5) dated Aug. 26, 2006 (GB0608528.6).

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