4. Electric lamp and discharge devices: systems
  5. Discharge device load with fluent material supply to the...
  6. Electron or ion source

Christopher Burgess

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Front plate for an ion source

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Ion beam generator

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Ion implanter electrodes

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2776093

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