Stock material or miscellaneous articles – Structurally defined web or sheet – Edge feature
Patent
1992-10-08
1994-04-05
Ryan, Patrick J.
Stock material or miscellaneous articles
Structurally defined web or sheet
Edge feature
430 5, 428447, 428421, B32B 960
Patent
active
053003489
ABSTRACT:
An improvement is proposed in a frame-supported pellicle consisting of a frame member and a thin transparent polymer membrane adhesively bonded to the frame member used for dustproof covering of a photomask in a photolithograpic patterning work of electronic devices. The improvement comprises using a specific fluorocarbon group-containing organosiloxane-based polymeric composition as an adhesive for adhesively bonding the frame member and the polymer membrane. This adhesive is effective even when the polymeric membrane is formed from a fluorocarbon polymer which is hardly susceptible to adhesive bonding with conventional adhesives. In addition, the adhesive bonding by use of this specific adhesive is highly durable even under irradiation with ultraviolet light.
REFERENCES:
patent: 5073422 (1991-12-01), Konno et al.
patent: 5168001 (1992-12-01), Legare et al.
Hamada Yuichi
Inomata Hiroshi
Kashida Meguru
Kubota Yoshihiro
Nagata Yoshihiko
Jewik Patrick R.
Ryan Patrick J.
Shin-Etsu Chemical Co. , Ltd.
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