Coherent light generators – Particular active media – Gas
Reexamination Certificate
2005-04-19
2005-04-19
Wong, Don (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S055000, C372S058000, C372S057000, C372S059000
Reexamination Certificate
active
06882674
ABSTRACT:
The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.
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Algots John M.
Anderson Stuart L.
Branham Mark S.
Cybulski Raymond F.
Emilo Jerome A.
Al-Nazer Leith A
Cray William
Cymer Inc.
Wong Don
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