4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. Utilizing a spectrometer

Raymond F. Cybulski

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DUV light source optical element improvements

Coherent light generators – Particular resonant cavity – Mirror support or alignment structure
Reexamination Certificate

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Four KHz gas discharge laser system

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Gas discharge laser with improved beam path

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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High power gas discharge laser with helium purged line...

Coherent light generators – Particular resonant cavity – Specified cavity component
Reexamination Certificate

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High power gas discharge laser with helium purged line...

Coherent light generators – Particular resonant cavity – Specified cavity component
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2461689

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