Formation of features in optical material

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface

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430324, 430945, 430321, 430296, 430394, 430322, 219121LH, 219121LA, 219121LK, 219121LJ, 219121LL, 219121EJ, 219121EK, 219121LD, 156643, 1562728, 156DIG8, G03C 500

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045980390

ABSTRACT:
A laser or other source of radiant electromagnetic energy removes optically transparent material (e.g., LiNbO.sub.3) to form various structures. To enhance coupling the radiant energy to the optical material, a layer of an ablative absorber (e.g., a metal or organic material) can be used. Alternately, the radiant source can be initially operated above a threshold that causes removal of a surface layer of the optical material. After selectively thus removing a surface layer of the optical material, subsequent sub-threshold applications of radiant energy remove additional optical material due to a change in the underlying material, rendering it more absorptive at the wavelength of the electromagnetic energy. Optical devices, including waveguides, can be formed, as well as isolation grooves, alignment structures, etc.

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