Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1984-07-02
1986-07-01
Louie, Won H.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430324, 430945, 430321, 430296, 430394, 430322, 219121LH, 219121LA, 219121LK, 219121LJ, 219121LL, 219121EJ, 219121EK, 219121LD, 156643, 1562728, 156DIG8, G03C 500
Patent
active
045980390
ABSTRACT:
A laser or other source of radiant electromagnetic energy removes optically transparent material (e.g., LiNbO.sub.3) to form various structures. To enhance coupling the radiant energy to the optical material, a layer of an ablative absorber (e.g., a metal or organic material) can be used. Alternately, the radiant source can be initially operated above a threshold that causes removal of a surface layer of the optical material. After selectively thus removing a surface layer of the optical material, subsequent sub-threshold applications of radiant energy remove additional optical material due to a change in the underlying material, rendering it more absorptive at the wavelength of the electromagnetic energy. Optical devices, including waveguides, can be formed, as well as isolation grooves, alignment structures, etc.
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Fischer Frederick H.
Murphy Edmond J.
Rice Trudie C.
AT&T Bell Laboratories
Fox James H.
Louie Won H.
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