Focusing apparatus of electron microscope

Details Focusing apparatus of electron microscope Focusing apparatus of electron microscope

1989-03-07

1990-06-12

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01V 3721

Patent

active

049335537

ABSTRACT:
A focusing apparatus of electron microscope for focusing an electron beam through a focusing lens onto a sample, having a deflecting means for making the electron beam scan on the sample, an astigmatism correcting means of the electron beam, a detecting means for detecting the 2nd electrons from the sample when the sample is scanned by the electron beam, and an optimum exciting current determining means of the focusing lens. The optimum exciting current is obtained by determining the position of the centroid of an area surrounded by a curve Y=f (I) and a fixed straight line. The curve Y shows the relationship between the exciting current for the focusing lens and an electron beam radius corresponding signal which is obtained on the basis of a signal from the detecting means and inversely corresponds to a radius of the electron beam on the surface of the sample.
The focusing apparatus enable the exact and simple determination of the optimum exciting current for the focusing lens corresponding to the circle of least confusion.

REFERENCES:
patent: 4214163 (1980-07-01), Namae et al.
patent: 4675528 (1987-06-01), Langner et al.

Affiliated with

Also associated with

Rating

Focusing apparatus of electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Focusing apparatus of electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Focusing apparatus of electron microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-618777