Focused ion beam irradiating apparatus

Details Focused ion beam irradiating apparatus Focused ion beam irradiating apparatus

1992-03-09

1992-11-17

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250251, 250397, 2504922, 2504923, H01J 37317

Patent

active

051645963

ABSTRACT:
An ion beam I is irradiated from an ion gun 10 onto a sample S on an XY stage 100, and an electron shower E is irradiated onto the sample S. Electrification of the sample by ion is neutralized by irradiation of the electron shower E. In the case of adjusting the electron shower E, a drive system 200 is driven by a control signal from a control unit 300 to scan a spot of the electron shower E by a Faraday cup F positioned at a corner of the XY stage 100. Detected current values of the Faraday cup F at respective scanning positions are amplified at an amplifier 210. The current values thus amplified are digitized at an A/D converter 220, and are then delivered to the control unit 300. The control unit 300 displays the intensity distribution of the electron shower E obtained by this scanning on a display unit 400.

REFERENCES:
patent: 4639301 (1987-01-01), Doherty et al.
patent: 4675530 (1987-06-01), Rose et al.
patent: 4874947 (1989-10-01), Ward et al.
patent: 4976843 (1990-12-01), Ward et al.

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