Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1989-06-29
1991-01-08
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250305, 250306, 250310, 324 713, 324158D, G01N 2322
Patent
active
049838300
ABSTRACT:
A focused ion beam apparatus which has a secondary electron energy filter apparatus. The secondary electron energy filter apparatus is basically composed of an extraction electrode for extracting secondary electrons generated from a sample by irradiating an ion beam thereon, and a grid electrode for discriminting the secondary electrons based on their energy levels. The focused ion beam apparatus is also equipped with a secondary electron detector for detecting secondary electrons which pass the grid electrode, thereby measuring the potential of the surface of the sample under treatment.
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Berman Jack I.
Nguyen Kiet T.
Seiko Instruments Inc.
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