Focused ion beam apparatus

Details Focused ion beam apparatus Focused ion beam apparatus

1994-07-11

1995-08-01

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250397, H01J 3728

Patent

active

054381975

ABSTRACT:
A focussed ion-beam apparatus, to realize the simultaneous observation of both the brighter area and the darker area on the sample, which are generated because of the difference in the generation efficiency of the secondary charged particle due to the ion-beam irradiation. According to the result in the comparison of the output signal from the secondary charged particle detector with the reference voltage, to optimize the signal above as the input signal for the image display. To realize the simultaneous observation of both the brighter area and the darker area of the sample.

REFERENCES:
patent: 4236073 (1980-11-01), Martin
patent: 4851673 (1989-07-01), Izumi et al.
patent: 5004927 (1991-04-01), Nakagawa

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