Fluid delivery ring and methods for making and implementing...

Details Fluid delivery ring and methods for making and implementing... Fluid delivery ring and methods for making and implementing...

2005-11-23

2009-02-24

Stinson, Frankie L (Department: 1792)

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

C134S036000

Reexamination Certificate

active

07494550

ABSTRACT:
A method for rinsing a semiconductor wafer in a module utilizing a fluid delivery ring is provided. The method includes providing a process bowl having a generally circular shape bottom wall, a sidewall that extends upwardly from the bottom wall to define a cylindrical chamber, and a plurality of channels in the sidewall that extend from the bottom wall to an upper edge of the sidewall. A fluid delivery ring is attached onto the sidewall of the process bowl. Utilizing the process bowl, a plurality of supply tubes is inserted into the fluid delivery ring. The fluid delivery ring has a plurality of ring inlet and outlet pairs and a plurality of respective slots. Fluid is supplied to the supply tubes, and fluid is directed onto a surface of the semiconductor wafer defined within the process bowl.

REFERENCES:
patent: 5522936 (1996-06-01), Tamura
patent: 5792272 (1998-08-01), van Os et al.
patent: 5885358 (1999-03-01), Maydan et al.
patent: 5950327 (1999-09-01), Peterson et al.
patent: 5962085 (1999-10-01), Hayashi et al.
patent: 6020570 (2000-02-01), Taki et al.
patent: 6024827 (2000-02-01), Ishii
patent: 6027662 (2000-02-01), Kaveh
patent: 6080046 (2000-06-01), Shendon et al.
patent: 6143078 (2000-11-01), Ishikawa et al.
patent: 6248168 (2001-06-01), Takeshita et al.
patent: 6258733 (2001-07-01), Solayappan et al.
patent: 6270862 (2001-08-01), McMillin et al.
patent: 6355902 (2002-03-01), Akahori et al.
patent: 6402598 (2002-06-01), Ahn et al.
patent: 6592709 (2003-07-01), Lubomirsky
patent: 61-296724 (1986-12-01), None
patent: 1-260823 (1989-10-01), None
patent: 3-131026 (1991-06-01), None
WIPO WO 99/44585 Oct. 199.

Affiliated with

Also associated with

Rating

Fluid delivery ring and methods for making and implementing... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fluid delivery ring and methods for making and implementing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fluid delivery ring and methods for making and implementing... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4058078