Optics: measuring and testing – Dimension
Reexamination Certificate
2009-03-12
2011-11-22
Pham, Hoa (Department: 2886)
Optics: measuring and testing
Dimension
C356S635000, C438S015000, C438S696000, C023S30800S
Reexamination Certificate
active
08064071
ABSTRACT:
A sheet measurement apparatus has a sheet disposed in a melt. The measurement system uses a beam to determine a dimension of the sheet. This dimension may be, for example, height or width. The beam may be, for example, collimated light, a laser, x-rays, or gamma rays. The production of the sheet may be altered based on the measurements.
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Bateman Nicholas P. T.
Blake Julian G.
Kellerman Peter L.
Rowland Christopher A.
Sinclair Frank
Pham Hoa
Varian Semiconductor Equipment Associates Inc.
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