4. Semiconductor device manufacturing: process
  5. Introduction of conductivity modifying dopant into...
  6. Ion implantation of dopant into semiconductor region

Nicholas P. T. Bateman

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Floating sheet measurement apparatus and method

Optics: measuring and testing – Dimension
Reexamination Certificate

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Masked ion implant with fast-slow scan

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Method and apparatus for producing a dislocation-free...

Semiconductor device manufacturing: process – With measuring or testing – Packaging or treatment of packaged semiconductor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2374117

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