Fixture used to prepare semiconductor specimens for film...

Details Fixture used to prepare semiconductor specimens for film... Fixture used to prepare semiconductor specimens for film...

2005-08-30

2005-08-30

Niebling, John F. (Department: 2812)

Active solid-state devices (e.g., transistors, solid-state diode

Test or calibration structure

C438S048000, C257S350000

Reexamination Certificate

active

06936843

ABSTRACT:
The present disclosure pertains to a method of preparing a test specimen for testing of the bonding strength of a layer of additive material to a crystalline substrate, or testing of the bonding strength of one layer of additive material to a second layer of additive material, where both layers of additive material overlie a crystalline substrate. The method includes both test specimen “cutting” from a large sample of material and preparation of an individual test specimen for four-point adhesion testing. Also described is a fixture which is useful for cutting the individual test specimen from the large sample of material.

REFERENCES:
patent: 5804466 (1998-09-01), Arao et al.
patent: 6486514 (2002-11-01), Jeong et al.
patent: 6506664 (2003-01-01), Beyne et al.
patent: 6716660 (2004-04-01), Jeong et al.
patent: 6730997 (2004-05-01), Beyne et al.
R. H. Dauskardt et al., “Adhesion and Debonding of Multi-Layer Thin Film Structures”,Engineering Fracture Mechanics, 61(1), pp. 141-162 (1998);.
M. Lane et al., “Adhesion and Reliability of Copper Interconnects with Ta and TaN Barrier Layers”,J. Mat. Res., 15(1), pp. 203-211 (2000).
Q. Ma et al., “Quantitative Measurement of Interface Fracture Energy in Multi-Layer Thin Film Structures”,Proceedings of MRS Annual Meeting, San Francisco, CA, pp. 3-14 and 91-96 (1995).

Affiliated with

Also associated with

Rating

Fixture used to prepare semiconductor specimens for film... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fixture used to prepare semiconductor specimens for film..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fixture used to prepare semiconductor specimens for film... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3479123