Film thickness and composition measurement via auger...

Details Film thickness and composition measurement via auger... Film thickness and composition measurement via auger...

2007-05-21

2009-02-24

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S305000, C250S288000, C250S307000, C250S309000, C250S3960ML, C702S035000, C378S045000, C378S046000, C324S754120

Reexamination Certificate

active

07495217

ABSTRACT:
In some embodiments, techniques are described for combining an X-ray detector (e.g., for providing EPMA) and an electron detector (e.g., for providing AES) to provide a tool for determining film compositions and thicknesses on a specimen, such as a semiconductor structure or wafer. In one embodiment, a system includes a beam generator configurable to direct a beam towards a specimen. The electron beam may generate Auger electrons and X-rays. The system may also include at least one electron detector disposed adjacent to (e.g., above) the specimen to detect electrons and measure their energies emanating from a top layer of the specimen. One or more X-ray detectors may be disposed adjacent to the specimen to detect X-rays.

REFERENCES:
patent: 7220964 (2007-05-01), Gao et al.

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