Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2004-09-20
2008-03-18
Punnoose, Roy M. (Department: 2886)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S630000
Reexamination Certificate
active
07345761
ABSTRACT:
A method of determining actual properties of layered media. An incident beam of light is directed towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light. The actual properties of the reflected beam of light are measured, and properties of the layered media are estimated. A mathematical model of the layered media is solved with the estimated properties of the layered media to yield theoretical properties of the reflected beam of light. The mathematical model is solved using at least one of a modified T matrix algorithm and a Z matrix algorithm. The theoretical properties of the reflected beam of light are compared to the actual properties of the reflected beam of light to yield a cost function. The estimated properties of the layered media are iteratively adjusted and the mathematical model is iteratively solved until the cost function is within a desired tolerance. The estimated properties of the layered media are reported as the actual properties of the layered media.
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patent: 6782337 (2004-08-01), Wack et al.
Li,Formulation and Comparison of Two Recursive Matrix Algorithms for Modeling Layered Diffraction Gratings, J. Opt. Soc. Am. , vol. 13, No. 5, pp. 1024-1035 (1996).
Moharam et al.,Formulation for Stable and Efficient Implementation of the Rigorous Coupled-Wave Analysis of Binary Gratings, Opt. Soc. Am. , vol. 12, No. 5, pp. 1068-1076 (1995).
Aoyagi Paul
Flanner, III Philip D.
Poslavsky Leonid
KLA-Tencor Technologies Corporation
Luedeka Neely & Graham P.C.
Punnoose Roy M.
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