Field emission type electron microscope using a multi-stage acce

Details Field emission type electron microscope using a multi-stage acce Field emission type electron microscope using a multi-stage acce

1984-11-29

1987-02-10

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

3133631, G01N 2300

Patent

active

046424610

ABSTRACT:
A field emission type electron microscope using a multi-stage acceleration tube wherein an acceleration voltage to be applied to at least one, always inclusive of a first-stage acceleration electrode, of acceleration electrodes is changed in interlocked relationship with a change in a field emission voltage to be applied to a field emission electrode, so that power of an electrostatic lens can be kept constant.

REFERENCES:
patent: 3691377 (1972-09-01), Matsui et al.
patent: 3760180 (1973-09-01), Weber
patent: 3946268 (1976-03-01), Welter
patent: 4160905 (1979-07-01), Davey
patent: 4274035 (1981-06-01), Fukuhara et al.

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