Field-emission transmission electron microscope and operation me

Details Field-emission transmission electron microscope and operation me Field-emission transmission electron microscope and operation me

1993-06-01

1994-12-13

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250307, 250396R, H01J 3726

Patent

active

053731581

ABSTRACT:
An object of the present invention is to realize a field-emission transmission electron microscope which is able to cope with both observation of an electron-microscopic image of a high brightness and microanalysis. A low aberration condenser lens 4 is disposed at the farthest position from a specimen 7, and a short focal length lens 5 is disposed at the midpoint between the specimen 7 and the condenser lens 4. In the case of an observation of an electron-microscopic image, the condenser lens unit is operated for enlargement in which the condenser lens 4 and the condenser lens 5 are driven in an interlocking motion. When the size of a beam spot on a specimen is to be reduced, a condenser lens 6 disposed close to the specimen between the condenser lens 5 and the specimen 7 is driven to make the condenser lens unit be operated for reduction. The coexistence of a small illuminating angle and the illumination of a specimen with a fine beam spot is realized, which makes it possible for a field-emission transmission electron microscope to have both functions, being able to observe a bright electron microscopic image and to perform an element analysis.

REFERENCES:
patent: 3795809 (1974-03-01), Takashima
patent: 3887835 (1975-06-01), Nomura
patent: 4099055 (1978-07-01), Todokoro
patent: 4210806 (1980-07-01), Broers
patent: 4246487 (1981-01-01), Anger et al.
patent: 4713543 (1987-12-01), Feuerbaum et al.
patent: 4880977 (1989-11-01), Tomita et al.
patent: 5013913 (1991-05-01), Benner

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