Field emission electron device which produces a constant beam cu

Details Field emission electron device which produces a constant beam cu Field emission electron device which produces a constant beam cu

1990-12-17

1992-07-28

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, G01N 2300

Patent

active

051342898

ABSTRACT:
A field emission electron microscope in which a controller is provided to make an electron beam current fixed due to variations in an accelerating voltage or an extracting voltage to thereby make fixed the brightness of an electron beam with which a specimen is illuminated.

REFERENCES:
patent: 3786305 (1974-01-01), Komoda et al.
patent: 3936756 (1976-02-01), Someya et al.
patent: 4642461 (1987-02-01), Endo et al.

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