Field-effect transistor with local source/drain insulation...

Details Field-effect transistor with local source/drain insulation... Field-effect transistor with local source/drain insulation...

2009-04-28

2010-11-02

Tran, Minh-Loan T (Department: 2826)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257SE29121

Reexamination Certificate

active

07824993

ABSTRACT:
A method for fabricating a field-effect transistor with local source/drain insulation. The method includes forming and patterning a gate stack with a gate layer and a gate dielectric on a semiconductor substrate; forming source and drain depressions at the gate stack in the semiconductor substrate; forming a depression insulation layer at least in a bottom region of the source and drain depressions; and filling the at least partially insulated source and drain depressions with a filling layer for realizing source and drain regions. Further, the step of forming source and drain depressions at the gate stack in the semiconductor substrate includes that first depressions are formed for realizing channel connection regions in the semiconductor substrate, spacers are formed at the gate stack, and second depressions are formed using the spacers as a mask in the first depressions and in the semiconductor substrate.

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