Static information storage and retrieval – Systems using particular element – Ferroelectric
Patent
1994-10-07
1996-01-02
Fears, Terrell W.
Static information storage and retrieval
Systems using particular element
Ferroelectric
365 53, G11C 1122
Patent
active
054814901
ABSTRACT:
Disclosed is a ferroelectric memory, comprising a semiconductor substrate, a ferroelectric thin film capacitor of a laminate structure formed on the substrate, the laminate structure consisting of a lower electrode, an oxide ferroelectric thin film and an upper electrode, and a protective thin film formed to cover at least the upper surface of the capacitor and consisting essentially of a nitride of aluminum, silicon or titanium.
REFERENCES:
patent: 3701121 (1972-10-01), Fraser
Kuroda Yoshimi
Tadokoro Kaoru
Watanabe Hitoshi
Fears Terrell W.
Olympus Optical Co,. Ltd.
Symetrix Corporation
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