Ferroelectric capacitor and ferroelectric memory with Ir-Ru...

Details Ferroelectric capacitor and ferroelectric memory with Ir-Ru... Ferroelectric capacitor and ferroelectric memory with Ir-Ru...

2008-10-29

2010-06-29

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C257SE21009, C257S295000

Reexamination Certificate

active

07745233

ABSTRACT:
A ferroelectric capacitor comprises a first electrode comprising an alloy of Ir and Ru, a ferroelectric layer disposed on the first electrode, and a second electrode disposed on the ferroelectric layer. A ferroelectric memory comprises a substrate and a plurality of memory cells arranged on the substrate. Each memory cell comprises a first electrode comprising an alloy of Ir and Ru, a ferroelectric layer disposed on the first electrode, and a second electrode disposed on the ferroelectric layer.

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Office Action dated Mar. 17, 2009 for corresponding Japanese Appln. No. 2005-219473.

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