Ferro-electric memory device and method of manufacturing the...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S296000, C257S303000

Reexamination Certificate

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06967367

ABSTRACT:
A ferro-electric memory device includes a semiconductor substrate, a first transistor formed on the semiconductor substrate, and a first ferro-electric capacitor electrically connected to the first transistor and formed of a first capacitor material layer having a first lower electrode, a first ferro-electric film, and a first upper electrode, the first ferro-electric capacitor being thicker at its central portion than at its ends.

REFERENCES:
patent: 6101085 (2000-08-01), Kawahara et al.
patent: 6724026 (2004-04-01), Jacob et al.
patent: 10-41478 (1998-02-01), None

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