Facilities connection box for pre-facilitation of wafer...

Details Facilities connection box for pre-facilitation of wafer... Facilities connection box for pre-facilitation of wafer...

2006-04-25

2006-04-25

Lee, Kevin (Department: 3753)

Fluid handling

With leakage or drip collecting

C137S597000, C137S884000, C204S298250, C204S298350, C414S935000

Reexamination Certificate

active

07032614

ABSTRACT:
A facilities connection box is provided to accommodate pre-plumbing of facilities lines required in connection with an installation of semiconductor device manufacturing equipment. The facilities connection box accommodates termination of double-containment facilities lines that are adapted to carry hazardous materials required for operation of the semiconductor device manufacturing equipment. Each double-containment facilities line is terminated in an isolation compartment of the facilities connection box. Each isolation compartment has an entry port adapted to couple to an incoming double-containment line and an exit port adapted to permit egress from the isolation compartment of a respective outgoing line.

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