Fabrication of integral lenses on LED devices

Details Fabrication of integral lenses on LED devices Fabrication of integral lenses on LED devices

1987-06-09

1989-01-10

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156649, 156651, 1566611, 156662, 252 794, H01L 21306, B44C 122

Patent

active

047971797

ABSTRACT:
Integrated lenses are fabricated on LED devices by chemical etching mesas through mask openings which are non-circular. The mask is removed and the mesas are then etched to form spherical lenses.

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patent: 4524127 (1985-06-01), Kane
S. Adachi, "Chemical Etching of InP and InGaAsP/InP", pp. 609-613, J. Electrochem Soc., vol. 129, No. 3, Mar. 1982.
S. Adachi and H. Kawaguchi, "Chemical Etching Characteristics of (001) InP," pp. 1342-1349, J. Electrochem. Soc., vol. 128, No. 6, Jun. 1981.
J. Heinen and Lauterbach, "High-Radiance Surface-Emitting etc.," Siemens Forsch-8 Entwick-Lungsber, 1982, vol. 11.
J. Heinen, "Preparation and Properties etc.", Electronic Lett., vol. 13, pp. 331-332, 1982.
O. Hasegawa and R. Namazu, "Coupling of Spherical-Surfaced Led etc.", J. Appl. Phys., vol. 51 (1), pp. 30-36, Jan. 1980.
F. W. Ostermayer et al., "Photochemical Etching etc.", App. Phys. Lett., vol. 43 (7), pp. 642-644, Oct., 1983.

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