Fabrication method of CMOS image sensor integrated with 1-T...

Details Fabrication method of CMOS image sensor integrated with 1-T... Fabrication method of CMOS image sensor integrated with 1-T...

2007-04-17

2009-02-17

Le, Thao P. (Department: 2818)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257SE27046

Reexamination Certificate

active

07491596

ABSTRACT:
A CMOS image sensor integrated with 1T-SRAM is provided on a substrate having a pixel array part, a logic circuit part, and a memory part by adding only one photoresist process. There are a plurality of CMOS image sensor devices in the pixel array part, a logic circuit in the logic circuit part, and a plurality of 1T-SRAMs in the memory part, and each part is isolated by a plurality of STI regions. The 1T-SRAM includes a capacitor structure and a transistor. The capacitor structure includes a well region as a bottom capacitor plate, a capacitor dielectric layer, and a top capacitor plate formed on the substrate respectively. The transistor includes a gate dielectric layer, a gate, a drain, and a source continuous with and electrically connected to the well region.

REFERENCES:
patent: 6563187 (2003-05-01), Park
patent: 6573010 (2003-06-01), Kling
patent: 6633831 (2003-10-01), Nikoonahad
patent: 6642098 (2003-11-01), Leung et al.
patent: 6673637 (2004-01-01), Wack
patent: 6806951 (2004-10-01), Wack
patent: 7098102 (2006-08-01), Lee
patent: 7148869 (2006-12-01), Chen et al.
patent: 2002/0053672 (2002-05-01), Yamazaki et al.
patent: 2004/0195600 (2004-10-01), Rhodes
patent: 2006/0256273 (2006-11-01), Yamazaki et al.
patent: 61-140168 (1986-06-01), None
patent: 1230370 (2005-04-01), None
patent: M264775 (2005-05-01), None

Affiliated with

Also associated with

Rating

Fabrication method of CMOS image sensor integrated with 1-T... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fabrication method of CMOS image sensor integrated with 1-T..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication method of CMOS image sensor integrated with 1-T... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4074418