Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2005-07-05
2005-07-05
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C430S321000, C430S323000, C430S324000, C430S329000, C385S131000, C385S014000, C438S696000, C438S695000, C438S700000, C359S569000
Reexamination Certificate
active
06913871
ABSTRACT:
Optical gratings are fabricated on a scale that may be smaller than the resolution of the lithographic system used to generate the grating pattern. Parallel ridges are formed using lithographic techniques. A conformal deposition and anisotropic etch are then used to form sidewalls on the sides of the ridges. After removing the ridges, the remaining sidewalls are used as a mask to etch the substrate. Removing the sidewalls leaves the desired grating pattern, with a pitch spacing of one-half that of the original ridges.
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Otte Jakob Homan, A GaAs/AIGaAs DBR laser diode with side-coupled Bragg gratings, A Dissertation submitted to the Swiss Federal Institute of Technology, Zurich for the degree of Doctor of Technical Services, 1996, pp. 67-80.
Chacko-Davis Daborah
McPherson John A.
Travis John F.
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